Low Temperature Nanoindentation: Development and Applications
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Updated: Dec 24, 2025

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Shunbo Wang1, Hongwei Zhao2,1
1School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130025, China.
Abstract:
Nanoindentation technique at low temperatures have developed from initial micro-hardness driving method at a single temperature to modern depth-sensing indentation (DSI) method with variable temperatures over the last three decades. The technique and implementation of representative cooling systems adopted on the indentation apparatuses are discussed in detail here, with particular emphasis on pros and cons of combination with indentation technique. To obtain accurate nanoindentation curves and calculated results of material properties, several influence factors have been carefully considered and eliminated, including thermal drift and temperature induced influence on indenter and specimen. Finally, we further show some applications on typical materials and discuss the perspectives related to low temperature nanoindentation technique.

