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Updated: Jun 19, 2026

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Microscopic sensors using optical wireless integrated circuits.

Alejandro J Cortese¹, Conrad L Smart¹, Tianyu Wang²

¹Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853.

Proceedings of the National Academy of Sciences of the United States of America

|April 19, 2020

Summary

This summary is machine-generated.

We developed a new platform for mass-producing microscopic electronic sensors. These tiny, light-powered devices can measure various environmental conditions, enabling new sensing applications.

Keywords:

microfabrication microscopic sensor

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Area of Science:

Microelectronic Engineering
Materials Science
Sensor Technology

Background:

Traditional sensors often lack miniaturization and parallel production capabilities.
Integrating diverse electronic components at the microscale presents significant fabrication challenges.

Purpose of the Study:

To develop a scalable platform for fabricating microscopic, untethered electronic sensors.
To demonstrate heterogeneous integration of silicon electronics and micro-light emitting diodes (LEDs).

Main Methods:

Utilized photolithographic techniques for parallel fabrication and packaging of sensors.
Developed a 100-μm-scale package integrating silicon electronics and inorganic micro-LEDs.
Enabled light-based power and communication for the microscopic sensors.

Main Results:

Achieved parallel production of approximately 10,000 individual sensors per square inch.
Demonstrated successful integration of diverse microelectronic components.
Successfully recorded voltage, temperature, pressure, and conductivity in various environments.

Conclusions:

The platform enables mass production of microscopic, standalone electronic sensors.
Light-powered and communicating sensors offer a novel approach for distributed sensing.
Proof-of-concept measurements confirm the utility of these sensors across multiple parameters.