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Published on: March 24, 2019
Charged domains in ferroelectric, polycrystalline yttrium manganite thin films resolved with scanning electron
Venkata Rao Rayapati1, Danilo Bürger, Nan Du
1Department Back-End of Line, Fraunhofer Institute for Electronic Nano Systems, 09126 Chemnitz, Germany.
Abstract:
We have investigated ferroelectric charged domains in polycrystalline hexagonal yttrium manganite thin films (Y1Mn1O3, Y0.95Mn1.05O3, Y1Mn0.99Ti0.01O3, and Y0.94Mn1.05Ti0.01O3) by scanning electron microscopy (SEM) in secondary electron emission mode with a small acceleration voltage. Using SEM at an acceleration voltage of 1.0 kV otherwise homogenous surface charging effects are reduced, polarization charges can be observed and polarization directions (±Pz) of the ferroelectric domains in the polycrystalline thin films can be identified. Thin films of different chemical composition have been deposited by pulsed laser deposition on Pt/SiO2/Si structures under otherwise same growth conditions. Using SEM it has been shown that different charged domain density networks are existing in polycrystalline yttrium manganite thin films.
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