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Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming
Binbin Pei1,2, Ke Sun1, Heng Yang1
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Sensors (Basel, Switzerland)
|April 26, 2020
Summary
This study presents an oven-controlled microelectromechanical systems (MEMS) oscillator with integrated micro-evaporation trimming for stable frequency across industrial temperatures. This technology enables permanent frequency adjustments after vacuum packaging, enhancing device reliability.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Frequency Control and Timing
- Materials Science
Background:
- Achieving stable frequency output from oscillators over wide temperature ranges is critical for many electronic systems.
- Traditional frequency trimming methods often occur before packaging, limiting post-manufacturing adjustments and long-term stability.
- Microelectromechanical systems (MEMS) offer miniaturization potential for frequency control devices.
Purpose of the Study:
- To develop an oven-controlled MEMS oscillator with integrated, post-packaging frequency trimming capabilities.
- To demonstrate permanent frequency trimming using micro-evaporation without significantly degrading temperature stability.
- To investigate the control and effectiveness of the micro-evaporation trimming process.
Main Methods:
- Utilized a length-extensional-mode MEMS resonator, micro-oven controlled and phosphorus-doped for inherent stability.
- Integrated micro-evaporators face-to-face with the resonator, encapsulated within a vacuum package.
- Employed electrical heating of micro-evaporators to deposit aluminum layers onto the resonator, thereby trimming its resonant frequency.
Main Results:
- Achieved a frequency instability of ±2.6 parts per million (ppm) over the -40 to 85 °C industrial temperature range.
- Demonstrated permanent frequency trimming up to -1442 ppm with a minimal increase in temperature drift to ±3.3 ppm.
- Showcased controllable trimming rates via electrical power, achieving significant coarse and fine trimming adjustments.
Conclusions:
- The developed oven-controlled MEMS oscillator with micro-evaporation trimming provides excellent frequency stability and permanent adjustability.
- Micro-evaporation trimming is an effective post-packaging technique that minimally impacts temperature performance.
- This technology enables robust and reliable frequency control solutions for demanding applications.
