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Updated: Dec 23, 2025
Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Vanadium-Oxide-Based Thin Films with Ultra-High Thermo-Optic Coefficients at 1550 nm and 2000 nm Wavelengths
Mohamed Abdel-Rahman1,2, Esam Bahidra1,2, Ahmed Fauzi Abas1
1Department of Electrical Engineering, College of Engineering, King Saud University, Riyadh 11421, Saudi Arabia.
Abstract:
In this paper, the temperature-dependent dielectric properties of vanadium-sesquioxide-based thin films are studied to assess their suitability for thermally tunable filters at optical communication wavelengths. Spectroscopic ellipsometry is utilized to measure the optical constants of vanadium oxide thin films at temperatures ranging from 25 °C to 65 °C. High thermo-optic coefficients (dn/dTs) were observed. The highest dn/dTs, measured at approximately 40 °C, were -8.4 × 10-3/°C and -1.05 × 10-2/°C at 1550 nm and 2000 nm, respectively.
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