Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography

Matthias Blaicher1,2, Muhammad Rodlin Billah1,2, Juned Kemal1

  • 11Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstraße 5, 76131 Karlsruhe, Germany.

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