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Updated: Dec 22, 2025

An Atmospheric Pressure Plasma Setup to Investigate the Reactive Species Formation
Published on: November 3, 2016
Plasma electron source for generating a ribbon beam in the forevacuum pressure range
A S Klimov1, I Yu Bakeev1, E M Oks1
1Physics Department, Tomsk State University of Control Systems and Radioelectronics, Tomsk 634050, Russia.
Abstract:
We describe a plasma-cathode electron beam source based on a hollow cathode glow discharge and operating in the forevacuum pressure range that produces a steady-state ribbon beam. The electron beam is generated in the pressure range of 10-30 Pa. A multi-aperture electron extraction and beam formation system is used to provide beam stability and enhanced uniformity of beam current density, allowing the use of this kind of device for beam-plasma surface modification over relatively large areas.
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