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Plasma electron source for generating a ribbon beam in the forevacuum pressure range
A S Klimov1, I Yu Bakeev1, E M Oks1
1Physics Department, Tomsk State University of Control Systems and Radioelectronics, Tomsk 634050, Russia.
The Review of Scientific Instruments
|May 3, 2020
Summary
A novel plasma-cathode electron beam source generates a stable, uniform ribbon beam in forevacuum conditions. This technology enables efficient beam-plasma surface modification over large areas.
Area of Science:
- Plasma physics
- Beam-plasma interactions
- Surface modification technologies
Background:
- Electron beam sources are crucial for various industrial and scientific applications.
- Existing sources often face limitations in operating pressure, beam uniformity, and area coverage.
- There is a need for advanced electron beam generation methods for large-area processing.
Purpose of the Study:
- To introduce a new plasma-cathode electron beam source.
- To demonstrate its capability for generating a steady-state ribbon beam.
- To evaluate its suitability for large-area surface modification.
Main Methods:
- Utilized a hollow cathode glow discharge for plasma generation.
- Operated the source within the forevacuum pressure range (10-30 Pa).
- Employed a multi-aperture electron extraction and beam formation system.
Main Results:
- Successfully generated a steady-state ribbon electron beam.
- Achieved enhanced uniformity in beam current density.
- Demonstrated stable beam operation in the specified pressure range.
Conclusions:
- The developed plasma-cathode electron beam source is effective for producing stable, uniform beams.
- Its forevacuum operation and large-area capability make it suitable for beam-plasma surface modification.
- This technology offers a promising advancement for surface treatment applications.
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