Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns

Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored.