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Updated: Jul 25, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
XTIP - the world's first beamline dedicated to the synchrotron X-ray scanning tunneling microscopy technique
Volker Rose1, Nozomi Shirato2, Michael Bartlein1
1Advanced Photon Source, Argonne National Laboratory, 9700 S Cass Ave, Lemont, IL 60439, USA.
Abstract:
In recent years, there have been numerous efforts worldwide to develop the synchrotron X-ray scanning tunneling microscopy (SX-STM) technique. Here, the inauguration of XTIP, the world's first beamline fully dedicated to SX-STM, is reported. The XTIP beamline is located at Sector 4 of the Advanced Photon Source at Argonne National Laboratory. It features an insertion device that can provide left- or right-circular as well as horizontal- and vertical-linear polarization. XTIP delivers monochromatic soft X-rays of between 400 and 1900 eV focused into an environmental enclosure that houses the endstation instrument. This article discusses the beamline system design and its performance.
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