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Transmission Electron Microscopy

Transmission Electron Microscopy

In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400...

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Nano-laminography with a transmission X-ray microscope.

Viktor Nikitin¹, Alberto Mittone¹, Samuel J Clark¹

¹Advanced Photon Source, Argonne National Laboratory, Lemont, IL 60439, USA.

Journal of Synchrotron Radiation

|September 10, 2025

Summary

X-ray nano-laminography provides high-resolution 3D imaging for flat samples. This advanced technique overcomes limitations of conventional nano-tomography, enabling detailed analysis of challenging specimens like integrated circuits.

Keywords:

laminography nano-tomography transmission X-ray microscope

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Area of Science:

Materials Science
Nanotechnology
X-ray Imaging

Background:

Conventional nano-tomography struggles with imaging laterally extended, flat specimens due to artifacts from long optical path lengths.
These limitations hinder detailed 3D structural analysis of planar samples, such as integrated circuits and challenging powder particle mounts.

Purpose of the Study:

To demonstrate a full-field X-ray nano-laminography system for high-resolution 3D imaging of flat specimens.
To overcome the limitations of conventional nano-tomography for imaging challenging sample geometries.

Main Methods:

Implementation of a full-field, X-ray nano-laminography system at the Advanced Photon Source (APS) beamline 32-ID.
Utilized a tilted rotational geometry (sample axis inclined 20° to the incident beam) to minimize artifacts.
Developed specific sample mounting strategies, data acquisition protocols, and reconstruction methods tailored for nano-laminography.

Main Results:

Achieved 50 nm spatial resolution in 3D imaging.
Demonstrated minute-scale temporal resolution for dynamic imaging.
Successfully imaged a planar integrated circuit and an individual particle within a powder sample, showcasing the technique's efficiency and versatility.

Conclusions:

X-ray nano-laminography is an effective technique for high-resolution 3D imaging of flat and extended specimens.
The developed system overcomes key challenges associated with conventional nano-tomography, enabling analysis of previously difficult samples.
This advancement facilitates detailed structural characterization in fields like microelectronics and materials science.