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Updated: Dec 21, 2025
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Published on: July 3, 2021
Modeling and correction of image pixel hysteresis in atomic force microscopy
Baishun Sun1, Liang Cao2, Zhengcheng Lu3
1Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, China; College of Medical Engineering, Jilin Medical University, 132013, Jilin, China; International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, 130022, Changchun, China.
This study introduces an image pixel hysteresis model to improve atomic force microscope (AFM) accuracy. The new model significantly reduces measurement errors in AFM scans, enhancing precision in 2D measurements.
Area of Science:
- Metrology
- Nanotechnology
- Surface Science
Background:
- Atomic Force Microscope (AFM) measurement accuracy relies heavily on piezo scanner displacement precision.
- Piezo scanner displacement exhibits complex hysteresis, limiting AFM system precision.
Purpose of the Study:
- To establish an image pixel hysteresis model for piezo scanner displacement in AFM systems.
- To correct AFM scan image inaccuracies caused by piezo scanner hysteresis.
Main Methods:
- Developed an image pixel hysteresis model for piezo scanner displacement.
- Utilized an AFM to scan a 2D grating at 0° and 90°.
- Employed polynomial fitting to determine model parameters for X and Y directions.
Main Results:
- Applied the model to correct AFM scan images of regular octagons.
- Reduced relative measurement error in the X-direction from 12.47% to 0.52%.
- Reduced relative measurement error in the Y-direction from 28.57% to 0.35%.
Conclusions:
- The image pixel hysteresis model effectively addresses piezo scanner hysteresis in AFM systems.
- The model significantly improves the 2-degree-of-freedom (2 DOF) measurement accuracy of AFM.
- This model is suitable for integration into commercial AFM post-processing software.
