Ag-Modified 3D Reduced Graphene Oxide Aerogel-Based Sensor with an Embedded Microheater for a Fast Response and
Qichao Li1,2, Di Chen1,2, Jianmin Miao1,2
1Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, P. R. China.
Abstract:
A chemiresistive gas sensor based on a three-dimensional Ag-modified reduced graphene oxide (3D Ag-rGO) aerogel is reported. We improve the graphene-based sensor performance by optimization of operating temperature, chemical modification, and new design of the material geometrical structure. The self-assembly and Ag nanoparticle (NP) decoration of the Ag-rGO aerogel are realized by a facile, one-step hydrothermal method. An integrated low-power microheater fabricated on a micromachined SiO2 membrane is employed to enhance the performance of the sensor with a fast response to NO2 and a shortened recovery time. The 3D Ag-rGO-based sensor at a temperature of 133 °C exhibits the highest response. At the same time, the response to other gases is suppressed while the response of the Ag-rGO sensor toward ammonia at 133 °C is reduced to half of the value at room temperature, demonstrating a greatly improved selectivity toward NO2. Additionally, the sensor exhibits a remarkably fast response to 50 ppb NO2 and a low limit of detection of 6.9 ppb.
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