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Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations.

Shizhuang Sun, Bo Yu, Tao Guo

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    |May 15, 2020
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    Fabricating molybdenum/silicon multilayer coatings showed that increasing substrate inclination angles significantly increases surface roughness and decreases reflectivity. A deposition model explains this, proposing methods to reduce interfacial roughness.

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    Area of Science:

    • Materials Science
    • Thin Film Technology
    • Surface Science

    Background:

    • Multilayer coatings are crucial for various optical applications.
    • Controlling surface and interface properties is key to coating performance.
    • Substrate manipulation during deposition can impact film morphology.

    Purpose of the Study:

    • To investigate the effect of substrate inclination angles on Mo/Si multilayer coatings.
    • To develop and validate a deposition model explaining observed phenomena.
    • To propose strategies for mitigating roughness issues.

    Main Methods:

    • Fabrication of Mo/Si multilayer coatings at varying substrate inclination angles.
    • Characterization of surface/interface roughness and reflectivity.
    • Development and application of a deposition process model.

    Main Results:

    • Surface and interface roughness increase with substrate inclination angle.
    • Coating reflectivity decreases, particularly at large angles (50-70°).
    • The developed model successfully explains the observed trends.

    Conclusions:

    • Substrate inclination angle is a critical parameter affecting Mo/Si multilayer coating quality.
    • The deposition model provides insights into roughness formation mechanisms.
    • Strategies to reduce interfacial roughness can be derived from this study.