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Fluid-Guided CVD Growth for Large-Scale Monolayer Two-Dimensional Materials.

Dong Zhou1,2, Ji Lang1,3, Nicholas Yoo2,4

  • 1Department of Mechanical Engineering, Villanova University, Villanova, Pennsylvania 19085, United States.

ACS Applied Materials & Interfaces
|May 19, 2020
PubMed
Summary

This study introduces a fluid-guided growth strategy to understand and control two-dimensional (2D) material synthesis via atmospheric pressure chemical vapor deposition (APCVD). Researchers achieved inch-scale monolayer MoSe2 films by optimizing fluid dynamics, enabling scalable 2D material production.

Keywords:
atmospheric pressure chemical depositioncomputational fluid dynamicsfluid guidedfluid velocityprecursor mixingshear stresstwo-dimensional materials

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Nanotechnology

Background:

  • Atmospheric pressure chemical vapor deposition (APCVD) is a cost-effective method for synthesizing two-dimensional (2D) materials.
  • Current understanding of APCVD reaction mechanisms and key parameters is limited, hindering scalability.
  • Existing APCVD methods struggle to produce large-scale, continuous 2D material films.

Purpose of the Study:

  • To develop a fluid-guided growth strategy for understanding and controlling 2D material synthesis.
  • To identify critical parameters influencing APCVD processes for improved scalability.
  • To achieve large-scale, high-quality monolayer 2D materials.

Main Methods:

  • Utilized Molybdenum Diselenide (MoSe2) as a model system for 2D material synthesis.
  • Integrated experimental studies with Computational Fluid Dynamics (CFD) analysis at a full-reactor scale.
  • Modified growth setup geometry to optimize precursor mixing and fluid velocity, and adjusted flow direction.

Main Results:

  • Identified precursor mixing, fluid velocity, and shear stress as critical parameters in APCVD.
  • Successfully produced inch-scale monolayer MoSe2 films by enhancing precursor mixing and reducing velocity shear.
  • Demonstrated a fluidic design approach for scalable 2D material synthesis.

Conclusions:

  • Fluidic design is crucial for controlling and scaling up 2D material synthesis via APCVD.
  • The developed strategy provides a foundation for designing advanced CVD systems for nanomaterial production.
  • Optimized fluid dynamics enable the scalable production of high-quality monolayer 2D materials.