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Thermal expansion in contact profilometers significantly impacts surface topography measurements. Stabilizing devices for 6-12 hours minimizes errors, ensuring accurate areal measurements and reducing topography result variations by up to 90%.

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Area of Science:

  • Metrology
  • Surface Science
  • Instrumentation Engineering

Background:

  • Contact profilometers are crucial for areal surface topography measurements.
  • Thermal phenomena, including internal heat sources, can introduce significant errors in precision measurements.
  • Environmental conditions and device stability are critical factors affecting measurement accuracy.

Purpose of the Study:

  • To investigate the influence of thermal phenomena on areal measurements using contact profilometers.
  • To quantify the impact of internal heat sources and environmental conditions on measurement accuracy.
  • To determine the thermal stabilization time required for reliable surface topography analysis.

Main Methods:

  • Development and utilization of a specialized thermal chamber for controlled environmental conditions.
  • Analysis of heat sources and temperature variations within the profilometer.
  • Calculation of axis displacements as a function of temperature.
  • Evaluation of the impact of Z-axis displacement on surface topography measurements.

Main Results:

  • Internal heat sources caused probe displacements up to 16.2 μm in the X-axis and 7.9 μm in the Z-axis.
  • Z-axis displacement significantly affected measured surface topography, leading to results up to 90% greater in unstable devices.
  • Thermal stabilization time for tested profilometers ranged from 6 to 12 hours.
  • Thermal stabilization significantly reduced surface irregularity errors.

Conclusions:

  • Thermal stability is essential for accurate areal measurements of surface topography with contact profilometers.
  • Internal heat sources and environmental factors necessitate a defined thermal stabilization period before measurement.
  • Individual determination of stabilization time for specific profilometer types is recommended for optimal accuracy.