Magnetostrictive Performance of Electrodeposited Tb_xDy_(1-x)Fe_y Thin Film with Microcantilever Structures

The microfabrication with a magnetostrictive Tb_xDy_(1-x)Fe_y thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb_xDy_(1-x)Fe_y is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb_0.36Dy_0.64Fe_1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.