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Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors.
Marie-Aline Mattelin1, Jeroen Missinne1, Bert De Coensel2
1Center for Microsystems Technology (CMST), Ghent University and imec, 9052 Ghent, Belgium.
Sensors (Basel, Switzerland)
|June 11, 2020
Summary
New polymer-based optical sensors utilize guided mode resonance (GMR) for cost-effective strain sensing. These GMR grating sensors offer sensitive, non-contact strain measurement with simple optical readout.
Area of Science:
- Optoelectronics
- Materials Science
- Nanotechnology
Background:
- Optical sensors offer advantages for strain measurement, including non-contact readout and simplified packaging.
- Guided Mode Resonance (GMR) in polymer-based gratings presents a promising avenue for developing sensitive and cost-effective strain sensors.
- Existing GMR sensors require further development for practical, large-scale applications.
Purpose of the Study:
- To develop and characterize polymer-based GMR grating sensors for optical strain sensing applications.
- To investigate the feasibility of using a soft stamp imprinting technique for GMR grating fabrication.
- To determine the absolute strain sensitivity of the fabricated GMR sensors using integrated reference sensors.
Main Methods:
- Fabrication of GMR gratings using electron beam lithography and soft stamp imprinting on polymer foils.
- Integration of GMR gratings and Bragg grating waveguides on the same sensor foil for reference measurements.
- Optical characterization of the sensor foils under applied strain to measure resonance shifts.
- Calculation of absolute strain sensitivity by comparing GMR sensor response to reference sensor data.
Main Results:
- Successful fabrication of GMR gratings on 175 μm-thick polymer foils with resonance in the 850-900 nm range.
- Demonstration of non-contact, optical readout capabilities for the GMR sensors.
- Accurate determination of the absolute strain sensitivity of the GMR gratings as 1.02 ± 0.05 pm/μϵ at 870 nm.
- Validation of the GMR sensors' performance using integrated Bragg grating waveguides as references.
Conclusions:
- Polymer-based GMR gratings are effective and sensitive optical strain sensors.
- The developed fabrication method allows for cost-effective production of GMR strain sensors.
- The GMR sensors exhibit high absolute strain sensitivity, making them suitable for various monitoring applications.

