Nonporous Inorganic Nanoparticle-Based Humidity Sensor: Evaluation of Humidity Hysteresis and Response Time

Fast-response humidity sensors using nanomaterials are attractive and have been intensively studied. Among the various nanomaterials, nonporous inorganic nanoparticles are suitable for use in humidity sensitive films for sensors. Here, we focus on a nonporous inorganic nanoparticle film and investigate a humidity sensor using the film. Hysteresis error and a dynamic response to a change of humidity are fundamental specifications of humidity sensors. A humidity sensor using a 50 nm silica nanoparticle film shows a hysteresis error of 2% at 85% RH and a response/recovery time of 2.8/2.3 s in 30% RH to 70% RH. We also summarize response/recovery times and hysteresis errors of state-of-the-art humidity sensors. As compared to those of commercial sensors and porous nanoparticle-based sensors evaluated using saturated salt solutions, the fabricated sensor shows a comparative hysteresis error and shorter response time.