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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Surface Analysis

    Background:

    • Speckle interferometry is a powerful technique for non-contact surface measurement.
    • Traditional phase-stepping methods can be complex to implement.
    • Controlling polarization states is crucial for precise phase analysis.

    Purpose of the Study:

    • To demonstrate a speckle out-of-plane interferometer utilizing polarization modulation.
    • To implement phase-stepping procedures for enhanced measurement accuracy.
    • To measure out-of-plane displacement on a flat metal plate.

    Main Methods:

    • A speckle interferometer was designed with polarization modulation.
    • Oppositely signed circular polarization states were generated in each arm.
    • Phase shifts were induced via a linear polarizer and analyzed.
    • A two-step algorithm was employed for phase-stepping.

    Main Results:

    • The system successfully generated phase shifts through polarization modulation.
    • Analysis of emerging polarization states yielded necessary phase shifts.
    • Out-of-plane displacement was measured on a flat metal plate.

    Conclusions:

    • The demonstrated interferometer effectively measures out-of-plane displacement.
    • Polarization modulation offers a viable method for phase-stepping in speckle interferometry.
    • The two-step algorithm provides accurate displacement measurements.