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Ultra-sensitive refractive index sensor using CMOS plasmonic transducers on silicon photonic interferometric platform
Optics Express
|July 19, 2020
Summary
This study introduces a novel CMOS-compatible plasmo-photonic sensor using aluminum and Si3N4 waveguides. It achieves record bulk sensitivity for biosensing applications, enabling mass production.
Area of Science:
- Photonics
- Plasmonics
- Biosensing
Background:
- Integrating plasmonics and silicon photonics offers high-performance biosensing.
- A key challenge is achieving this integration using only CMOS-compatible materials.
Purpose of the Study:
- To demonstrate a novel CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer (MZI) sensor.
- To achieve high bulk sensitivity for refractive-index sensing applications.
Main Methods:
- Fabrication of an MZI sensor using silicon nitride (Si3N4) waveguides and aluminum stripes.
- Integration of a thermo-optic phase shifter and variable optical attenuator for performance optimization.
Main Results:
- Achieved a record-high bulk sensitivity of 4764 nm/RIU.
- Demonstrated a high extinction ratio of up to 38 dB.
- Confirmed CMOS compatibility for potential volume manufacturing.
Conclusions:
- The developed sensor represents a significant advancement in plasmo-photonic refractive-index sensing.
- Its CMOS compatibility and high sensitivity pave the way for widespread adoption in biosensing.
