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Updated: Dec 13, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
George Krasin1, Michael Kovalev1, Nikita Stsepuro1
1Laser and Optoelectronic Systems Department, Bauman Moscow State Technical University, 2nd Baumanskaya st. 5/1, 105005 Moscow, Russia.
This study introduces a novel holographic wavefront sensor using computer-generated Fourier holograms. The improved method offers higher diffraction efficiency and a more compact design for wavefront aberration measurement.
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