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Updated: Dec 13, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

948

Study on the dual-Fano resonance generation and its potential for self-calibrated sensing

Xiang Zhao, Zhuo Cheng, Ming Zhu

    Optics Express
    |August 6, 2020
    PubMed

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