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A Modeling and Simulation Method for Preliminary Design of an Electro-Variable Displacement Pump

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Simulation and Nonlinearity Optimization of a High-Pressure Sensor.

Ting Li^1,2, Haiping Shang¹, Weibing Wang¹

¹Institute of Microelectronics of The Chinese Academy of Sciences, Beitucheng West Road, Beijing 100029, China.

Sensors (Basel, Switzerland)

|August 14, 2020

Summary

This study optimized a high-pressure sensor by adjusting piezoresistor placement, significantly reducing nonlinear error. The novel method enhances accuracy for demanding pressure sensing applications.

Keywords:

nonlinearity piezoresistive pressure sensor sensitivity simulation stress

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Last Updated: Dec 12, 2025

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Area of Science:

Mechanical Engineering
Materials Science
Electrical Engineering

Background:

A novel 0-120 MPa pressure sensor with a square diaphragm, protected by an oil-filled package, was designed and fabricated.
The initial sensor exhibited nonlinearity below 0.4% and accuracy of 0.43% without circuit compensation.

Discussion:

Simulations using ANSYS software explored the impact of piezoresistor placement on sensor output voltage and nonlinearity.
A critical finding revealed that altering the stress ratio between longitudinal (R_L) and transverse (R_T) resistors influences nonlinear error, causing it to initially decrease before increasing.

Key Insights:

A theoretical framework and mathematical model were developed to explain the observed phenomenon of nonlinear error reduction and subsequent increase.
A new optimization strategy was proposed to minimize nonlinearity in high-pressure sensors while maintaining peak sensitivity.

Outlook:

The optimized sensor model demonstrated a substantial performance enhancement, reducing nonlinear error from 0.106% to an exceptional 0.0000713%.
This research offers a pathway for developing highly accurate and reliable high-pressure sensing solutions for advanced industrial and scientific applications.