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Haiping Shang

3PUBLICATIONS
0CO-AUTHORS
Microelectromechanical systems (MEMS)Ceramics
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Publications (3)

Sort by Publication Date:
|Jan 12, 2021
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor.

Baohua Tian, Haiping Shang, Lihuan Zhao

|Jan 05, 2021
Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications.

Lihuan Zhao, Haiping Shang, Dahai Wang

|Aug 14, 2020
Simulation and Nonlinearity Optimization of a High-Pressure Sensor.

Ting Li, Haiping Shang, Weibing Wang

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