Mechanical Properties and Vacuum Tribological Performance of Mo-S-N Sputtered Coatings

Kaushik Hebbar Kannur1,2, Talha Bin Yaqub2,3, Christophe Pupier1

  • 1IREIS, HEF Group, ZI Sud - Avenue Benoît Fourneyron CS 42077, 42162 Andrézieux-Bouthéon, France.