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Updated: Dec 10, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dual wavelength digital holographic imaging of layered structures
Ting Chean Khoo1, Anna Sharikova1, Alexander Khmaladze1
1Physics Department, SUNY University at Albany, 1400 Washington Avenue, Albany, NY 12222 USA.
Abstract:
We present a dual wavelength digital holographic technique for three-dimensional microscopic imaging of layered structures, where layers are separated from one another by the axial distances exceeding the wavelength of imaging light. Our methodology not only provides the three-dimensional structure of each layer, but also allows the height differentiation of distinct layers. We have also implemented a technique suppressing low intensity signal when no reliable phase information can be extracted, based on the quality of the interference fringe pattern. We utilize a dual wavelength setup, where the combination of two overlapping interferometers enables simultaneous acquisition of two phase profiles. We demonstrate that this imaging modality is particularly well-suited for imaging of multilayered electrode structures embedded in glass.
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