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Updated: Dec 10, 2025
A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor
Xin Cheng1, Jitendra Narayan Dash1, Dinusha Serandi Gunawardena1
1Department of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, China.
Abstract:
A simple, compact, and highly sensitive gas pressure sensor based on a Fabry-Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of -0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.
