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High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing
Shuai Xu1, Hua Fan2, Si-Jia Xu1
1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Nanomaterials (Basel, Switzerland)
|September 5, 2020
Summary
We developed a simple, high-throughput method using femtosecond-laser direct writing (FsLDW) and annealing to create nanostructured geometric phase elements. This vacuum-free technique offers improved surface morphology and potential for advanced optical applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Fabricating nanostructured geometric phase elements for visible light requires advanced, high-throughput, vacuum-free technologies.
- Existing methods often face limitations in flexibility and processing speed.
Purpose of the Study:
- To propose and demonstrate a novel, efficient, and simple manufacturing method for geometric phase elements.
- To combine femtosecond-laser direct writing (FsLDW) with thermal annealing for enhanced fabrication.
Main Methods:
- Utilized femtosecond-laser direct writing (FsLDW) with a 343 nm wavelength and circular polarization.
- Employed laser direct ablation in a non-vacuum environment to create nanogratings (300 nm period, 170 nm grooves) in 50 seconds.
- Applied hot-annealing for surface morphology refinement.
Main Results:
- Successfully fabricated free-form nanogratings with improved surface morphology after annealing.
- Demonstrated the fabrication of various geometric phase elements, including blazed gratings, metasurface lenses, vortex Q-plates, and "M" holograms.
- Confirmed the designed performance by analyzing phase characteristics at 808 nm.
Conclusions:
- The proposed FsLDW and annealing method is efficient and simple for fabricating geometric phase elements.
- This technique enables the creation of elements with low loss, high-temperature resistance, high phase gradients, and novel polarization functionalities.
- The method holds potential for wide applications in advanced optical devices.

