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Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device.

Mohamed Y Elsayed1, Sherif M Sherif2,3, Amina S Aljaber2

  • 1Institute of Biomedical Engineering (BME), University of Toronto, Toronto, ON M5S 3E2, Canada.

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Summary

Ultrathin waveguides enable highly sensitive biosensors. Optimized 50-nm and 70-nm thick multimode interference (MMI) devices show potential for detecting glucose and protein layers.

Keywords:
multimode interferenceoptical biosensorsultrathin silicon waveguides

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Area of Science:

  • Photonics and Nanotechnology
  • Biomedical Engineering
  • Materials Science

Background:

  • Explores the use of sub-100 nm thick waveguides for advanced sensor applications.
  • Focuses on the design and analysis of multimode interference (MMI) devices for biosensing.
  • Validates design methodologies by comparing simulated and measured spectra of fabricated devices.

Discussion:

  • Optimized MMI biosensor designs on sub-100 nm platforms using finite difference time domain (FDTD) simulations.
  • Evaluates performance metrics including sensitivity, figure of merit (FOM), and limit of detection (LOD).
  • Compares the trade-offs between sensor thickness, device length, and performance.

Key Insights:

  • A 50-nm thick MMI sensor achieved a sensitivity of 420 nm/RIU and FOM of 133.
  • A 70-nm thick sensor achieved a similar FOM of 134 with a shorter length (2.4 mm) and sensitivity of 330 nm/RIU.
  • Demonstrated potential for detecting glucose (LOD < 10 mg dL⁻¹) and thin protein layers (1 nm).

Outlook:

  • Ultrathin silicon-on-insulator (SOI) waveguides are promising for MMI-based biosensing.
  • The simple MMI structure offers a scalable platform for various biomolecular detection applications.
  • Further research can explore integration into complex lab-on-a-chip systems.