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Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device.
Mohamed Y Elsayed1, Sherif M Sherif2,3, Amina S Aljaber2
1Institute of Biomedical Engineering (BME), University of Toronto, Toronto, ON M5S 3E2, Canada.
Sensors (Basel, Switzerland)
|September 5, 2020
Summary
Ultrathin waveguides enable highly sensitive biosensors. Optimized 50-nm and 70-nm thick multimode interference (MMI) devices show potential for detecting glucose and protein layers.
Area of Science:
- Photonics and Nanotechnology
- Biomedical Engineering
- Materials Science
Background:
- Explores the use of sub-100 nm thick waveguides for advanced sensor applications.
- Focuses on the design and analysis of multimode interference (MMI) devices for biosensing.
- Validates design methodologies by comparing simulated and measured spectra of fabricated devices.
Discussion:
- Optimized MMI biosensor designs on sub-100 nm platforms using finite difference time domain (FDTD) simulations.
- Evaluates performance metrics including sensitivity, figure of merit (FOM), and limit of detection (LOD).
- Compares the trade-offs between sensor thickness, device length, and performance.
Key Insights:
- A 50-nm thick MMI sensor achieved a sensitivity of 420 nm/RIU and FOM of 133.
- A 70-nm thick sensor achieved a similar FOM of 134 with a shorter length (2.4 mm) and sensitivity of 330 nm/RIU.
- Demonstrated potential for detecting glucose (LOD < 10 mg dL⁻¹) and thin protein layers (1 nm).
Outlook:
- Ultrathin silicon-on-insulator (SOI) waveguides are promising for MMI-based biosensing.
- The simple MMI structure offers a scalable platform for various biomolecular detection applications.
- Further research can explore integration into complex lab-on-a-chip systems.

