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Updated: Dec 7, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Holography: application to high-resolution imaging.

Takeshi Kawasaki¹, Yoshio Takahashi¹, Toshiaki Tanigaki¹

¹Research & Development Group, Hitachi, Ltd., Hatoyama, Saitama, 350-0395, Japan.

Microscopy (Oxford, England)

|September 29, 2020

Summary

This summary is machine-generated.

Electron holography corrects electron microscope aberrations for atomic imaging. Advanced techniques now enable high-resolution analysis of electromagnetic distributions in materials.

Keywords:

aberration corrector electron holography high-resolution imaging magnetic imaging transmission electron microscope

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Area of Science:

Materials Science
Physics
Microscopy

Background:

Electron holography was initially developed to correct lens aberrations in electron microscopes.
Decades of research led to its application in observing atomic arrangements within crystals.
Subsequent integration with hardware aberration correctors significantly enhanced analytical capabilities.

Purpose of the Study:

To detail the evolution and advancements of electron holography.
To highlight its application in high-resolution and high-precision analysis.
To showcase its utility in observing electromagnetic distributions in functional materials.

Main Methods:

Utilizing electron holography for aberration correction in electron microscopy.
Combining electron holography with hardware aberration correctors.
Applying high-resolution electron holography for nanoscale magnetic observations.

Main Results:

Achieved precise observation of atomic arrangements in crystals.
Enabled high-resolution and high-precision analytical capabilities.
Extended applications to sub-nanometer magnetic observations.

Conclusions:

High-resolution electron holography is a powerful technique for analyzing electromagnetic distributions.
The technique is crucial for understanding functional materials at the nanoscale.
Continued advancements have broadened the scope and precision of electron holography applications.