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Updated: Dec 7, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Evaluation of depth of dislocation visibility in SEM electron channeling contrast imaging in Ti-6Al-4V alloy using
Shigeto Yamasaki1, Misaki Deguchi2, Masatoshi Mitsuhara3
1Department of Materials Science and Engineering, Kyushu University, Fukuoka, Fukuoka 819-0395, Japan.
Abstract:
In this study, we conducted a quantitative evaluation of dislocation density by scanning electron microscopy electron channeling contrast imaging for α grains of a Ti-6Al-4V alloy deformed at room temperature. The depth of visibility of dislocations is experimentally measured as 140 to 160 nm by a serial sectioning observation. This result is compared with the theoretical value and applied to evaluate dislocation density. These factors confirm that the theoretically calculated value of the depth of visibility, at 5 to 6 times the extinction distance, is valid for the hexagonal close-packed Ti alloy.

