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Updated: Dec 6, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Yushin Kim1,2, Byoung Jun Park1, Moohyuk Kim1
1KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul, 02841, Republic of Korea.
Researchers reviewed subwavelength metallic cavities for photonic integrated circuits. These advanced plasmonic cavities overcome the diffraction limit, enabling smaller, high-performance devices for next-generation light sources.
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