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Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage
Yong-Sik Kim1, Nicholas G Dagalakis1, Young-Man Choi2
1Intelligent Systems Division, Engineering Laboratory, National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, MD 20899, USA.
Microelectronic Engineering
|October 16, 2020
Summary
This study introduces a novel Fabry-Pérot interferometer sensor for Micro-Electro-Mechanical-Systems (MEMS) displacement measurement. The sensor achieves high accuracy over a larger range than previously possible, enabling real-time monitoring.
Area of Science:
- Optoelectronics
- Micro-Electro-Mechanical-Systems (MEMS)
- Optical Sensing
Background:
- Fabry-Pérot interferometer sensors offer high accuracy and noise immunity for MEMS applications.
- Existing MEMS-compatible sensors are limited by their micro-scale measurement range.
Purpose of the Study:
- To propose and validate a novel Fabry-Pérot interferometer in-plane displacement sensor for MEMS devices.
- To overcome the range limitations of conventional MEMS displacement sensors.
Main Methods:
- Utilizing a polished optical fiber and a modulated laser source to form an optical cavity with a MEMS device sidewall.
- Implementing sinusoidal phase modulation combined with an extreme point search algorithm for real-time displacement measurement.
- Integrating the sensor onto a single degree-of-freedom MEMS motion stage for performance evaluation.
Main Results:
- The proposed sensor successfully measures displacements exceeding 3 micrometers.
- Achieved a measurement accuracy of less than 35 nanometers.
- Demonstrated real-time displacement monitoring capabilities on a MEMS motion stage.
Conclusions:
- The developed Fabry-Pérot interferometer sensor significantly expands the measurable displacement range for MEMS devices.
- The sensor provides a viable solution for accurate, real-time displacement monitoring in MEMS applications.
- This technology holds promise for advanced MEMS characterization and control.
