An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication
Anders Henriksson1, Laura Kasper2, Matthias Jäger2
1Institute of Biotechnology, Technische Universität Berlin, Ackerstrasse 76, 13355 Berlin, Germany.
Micromachines
|October 27, 2020
Summary
Dielectrophoresis (DEP) enhances silicon microring resonator biosensors by using electric fields to improve analyte delivery. This method overcomes diffusion limits, significantly boosting sensor sensitivity for nanoscale applications.
Area of Science:
- Photonics
- Biosensing
- Nanotechnology
Background:
- Silicon-based photonic microring resonators offer miniaturization and high sensitivity for biosensing.
- Nanoscale biosensors face limitations due to analyte mass transfer and bonding kinetics.
- Dielectrophoresis (DEP) can potentially overcome diffusion limits by manipulating charged particles.
Purpose of the Study:
- To design and simulate a microring resonator biosensor enhanced with integrated electrodes for dielectrophoresis.
- To explore the application of DEP to improve analyte delivery and sensing efficiency in microring resonators.
Main Methods:
- Design of microring resonators with two distinct integrated electrode configurations.
- Finite Element Method (FEM) simulations to calculate electric field gradients (∇E²).
- Fabrication process flow for the DEP-enhanced microring resonator biosensor.
Main Results:
- Simulations predicted electric field gradients (∇E²) exceeding 10^17 V²/m³ near sensing areas for both electrode designs.
- Achieved electric field gradients are comparable to those effective for interacting with biomolecules like proteins and antibodies.
Conclusions:
- The proposed dielectrophoresis-enhanced microring resonator design shows promise for increasing biosensor sensitivity.
- Integrated electrodes and DEP offer a viable strategy to overcome diffusion limitations in nanoscale biosensing.
