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Guided-mode resonance based humidity sensing using a multilayer dielectric structure.

Michal Gryga, Dalibor Ciprian, Petr Hlubina

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    |October 29, 2020
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    Summary

    This study introduces a new sensor for measuring relative humidity (RH) using guided-mode resonance (GMR) in multilayer dielectric structures. The sensor achieves high sensitivity and hysteresis-free performance, offering a stable alternative to existing humidity sensors.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Sensor Technology

    Background:

    • Accurate relative humidity (RH) measurement is crucial in various scientific and industrial applications.
    • Existing humidity sensors often face limitations such as hysteresis, poor stability, or limited sensitivity.
    • Guided-mode resonance (GMR) in multilayer dielectric structures (MDS) offers potential for novel sensing applications.

    Purpose of the Study:

    • To develop and demonstrate a highly sensitive humidity sensor based on GMR in an MDS.
    • To investigate the influence of polarization and phase difference on GMR for enhanced sensing performance.
    • To evaluate the sensor's sensitivity, figure of merit (FOM), and hysteresis-free characteristics.

    Main Methods:

    • Fabrication of a multilayer dielectric structure (MDS) comprising TiO2/SiO2 bilayers with a TiO2 termination layer.
    • Utilizing guided-mode resonance (GMR) and spectral interference of s- and p-polarized waves reflected from the MDS.
    • Incorporating a birefringent mica crystal to modify the phase difference between polarized waves and enhance GMR.
    • Characterizing the GMR response to changes in relative humidity and refractive index.

    Main Results:

    • The GMR in the MDS exhibited a shallow, asymmetric dip, enabling RH measurement with sensitivities of 0.031-0.114 nm/%RH.
    • Employing mica enhanced the GMR to a sharp dip, increasing sensitivity to 0.120 nm/%RH at 81 %RH.
    • High sensitivity to refractive index (8000 nm/RIU) and figure of merit (702 RIU⁻¹) were achieved.
    • The sensor demonstrated hysteresis-free operation.

    Conclusions:

    • The GMR-based sensor utilizing MDS and controlled spectral interference of polarized waves provides highly sensitive and hysteresis-free humidity measurements.
    • The sensor exhibits excellent mechanical and chemical stability, making it a viable alternative to conventional humidity sensors.
    • The demonstrated approach offers a promising platform for advanced optical sensing applications.