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    Area of Science:

    • Materials Science
    • Nanotechnology
    • Building Technology

    Background:

    • Smart windows are crucial for energy efficiency in green buildings.
    • Existing electrically-controlled microshutters typically operate in a binary (on/off) mode.
    • A need exists for microshutters capable of continuous light modulation.

    Purpose of the Study:

    • To propose and demonstrate an electrothermally actuated microshutter for analog light control.
    • To investigate the tunable light transmission capabilities of the microshutter device.
    • To evaluate the performance, reliability, and window-like functionality of the microshutters.

    Main Methods:

    • Fabrication of an array of Al/SiO2 bimorph cantilever microshutters using surface- and bulk-micromachining.
    • Suspension of microshutters over a through-silicon cavity for actuation.
    • Experimental testing of single pixel and array performance, including opening ratio and light transmission under varying voltages.

    Main Results:

    • A single microshutter pixel achieved continuous tuning of its opening ratio from 78.6% to nearly 0% with minimal hysteresis.
    • An array of 2x5 microshutters demonstrated a continuous variation in light transmission from 63.3% to 3.6% with applied voltage.
    • Response time, long-term reliability, and window-like functionality were experimentally validated.

    Conclusions:

    • The developed electrothermal microshutter successfully achieves analog light control for smart windows.
    • The device offers a promising solution for advanced sunlight management in buildings.
    • The microshutters exhibit tunable performance, reliability, and practical window functionality.