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Updated: Dec 3, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Electron image contrast analysis of mosaicity in rutile nanocrystals using direct electron detection
Aram Yoon1, Yu Tsun Shao1, Jane Howe2
1Materials Science and Engineering, University of Illinois at Urbana-Champaign, 1304 W. Green Street, Illinois 61801, USA.
Abstract:
Direct electron detection provides high detective quantum efficiency, significantly improved point spread function and fast read-out which have revolutionized the field of cryogenic electron microscopy. However, these benefits for high-resolution electron microscopy (HREM) are much less exploited, especially for in situ study where major impacts on crystallographic structural studies could be made. By using direct detection in electron counting mode, rutile nanocrystals have been imaged at high temperature inside an environmental transmission electron microscope. The improvements in image contrast are quantified by comparison with a charge-coupled device (CCD) camera and by image matching with simulations using an automated approach based on template matching. Together, these approaches enable a direct measurement of 3D shape and mosaicity (∼1°) of a vacuum-reduced TiO2 nanocrystal about 50 nm in size. Thus, this work demonstrates the possibility of quantitative HREM image analysis based on direct electron detection.
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