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Any physical property that depends consistently and reproducibly on temperature can be used as the basis of a thermometer. For example, volume increases with temperature for most substances. This property is the basis for the common alcohol thermometer and the original mercury thermometers. Other properties used to measure temperature include electrical resistance, color, and the emission of infrared radiation.
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The operational amplifier, often referred to as an op-amp, is a multifaceted building block of a circuit. This electronic component functions like a voltage-controlled voltage source and can also be used to create a voltage- or current-controlled current source. The design of an operational amplifier enables it to execute mathematical operations when external components like resistors and capacitors are linked to its terminals. An op-amp has the capacity to sum signals, amplify a signal,...
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Procedural Guide for Assessing Axillary Body Temperature using a Digital Thermometer:
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Data Acquisition Protocol for Determining Embedded Sensitivity Functions
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An integrated packaged resonant accelerometer with temperature compensation.

Bo Li1, Cun Li1, Yulong Zhao1

  • 1State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

The Review of Scientific Instruments
|November 3, 2020
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Summary
This summary is machine-generated.

This study presents an integrated sensor combining a micro resonant accelerometer and temperature sensor. Novel temperature compensation significantly improves accelerometer performance, reducing output drift and zero bias error for enhanced accuracy.

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Area of Science:

  • Micro-electromechanical systems (MEMS)
  • Sensor technology
  • Inertial sensing

Background:

  • Traditional resonant accelerometers face challenges with temperature-induced drift due to manufacturing variations.
  • Differential configurations offer some thermal compensation but cannot fully eliminate temperature effects.
  • Integrated sensing solutions are needed for simultaneous acceleration and temperature measurement.

Purpose of the Study:

  • To design, fabricate, and test an integrated packaged sensor with a micro resonant accelerometer and a temperature sensor.
  • To develop and implement a novel temperature compensation method for improving accelerometer performance.
  • To achieve real-time, online temperature compensation for enhanced accuracy.

Main Methods:

  • Utilized a differential configuration with double quartz resonators and a silicon substrate for the accelerometer.
  • Integrated a temperature sensor within the same package for simultaneous measurement.
  • Developed a hybrid temperature compensation algorithm combining variable coefficient regression and least squares support vector machine (LS-SVM).
  • Implemented real-time compensation using a field-programmable gate array (FPGA).

Main Results:

  • The integrated sensor successfully measures acceleration and temperature simultaneously.
  • The novel temperature compensation significantly reduced the scale factor output drift from 0.072 Hz/g to 0.015 Hz/g across the full temperature range.
  • Zero bias drift was dramatically improved from 345 mg to 1.9 mg.
  • Accelerometer sensitivity was measured at approximately 16.97 Hz/g.

Conclusions:

  • The integrated packaged sensor with advanced temperature compensation effectively mitigates temperature drift in micro resonant accelerometers.
  • The developed compensation strategy enhances the accuracy and reliability of inertial sensing systems.
  • This integrated approach offers a robust solution for applications requiring precise acceleration measurements under varying temperature conditions.