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Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
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Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Lucia Romano1,2,3
1Institute for Biomedical Engineering, University and ETH Zürich, CH-8092 Zürich, Switzerland.
Micromachines
|November 4, 2020
Abstract:
Discovered by Li and Bohn in 2000 [1], Metal Assisted Chemical Etching has been finally recognized as an emerging etching technology.[...].

