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    Area of Science:

    • Optics
    • Microscopy
    • Materials Science

    Background:

    • Near-field optical microscopy (NMS) offers high-resolution surface imaging.
    • Conventional NMS struggles to resolve structures deep within samples due to light scattering limitations.

    Purpose of the Study:

    • To develop a novel NMS technique for obtaining depth information beyond the diffraction limit.
    • To enable simultaneous high-resolution surface and subsurface imaging.

    Main Methods:

    • Utilizing interference patterns generated by divergent incident and scattered light.
    • Analyzing depth structures via correlation coefficients between observed and calculated interference patterns.
    • Scanning a near-field light source on a single plane for data acquisition.

    Main Results:

    • Achieved depth information resolution within the diffraction limit of light.
    • Successfully visualized both surface topography and subsurface structures.
    • Demonstrated the capability of observing 3D structures with diffraction-limited resolution.

    Conclusions:

    • The proposed technique overcomes the depth-imaging limitations of conventional NMS.
    • It provides a powerful tool for comprehensive 3D structural analysis of samples.
    • This advancement facilitates detailed investigation of both surface and internal sample features.