First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Area of Science:

• Mechatronics Engineering
• Control Systems
• Micro-electromechanical Systems (MEMS)

Background:

• Designing closed-loop controllers for micro-electromechanical system (MEMS) disk resonator gyroscopes (DRGs) is challenging due to nonlinearities in their mechatronics models.
• Classical automatic control theory struggles with complex nonlinear systems, hindering effective controller design and performance analysis.

Purpose of the Study:

• To establish a first-order closed-loop mechatronics model for a MEMS DRG with a configurable ASIC.
• To develop and validate a method for linearizing nonlinear modules within the gyroscope model to facilitate controller design.

Main Methods:

• A first-order closed-loop mechatronics model of a MEMS DRG was developed.
• An order-reduction method (ORM), utilizing Laplace and inverse Laplace transforms, was proposed to linearize nonlinear system modules.
• The linearized model's accuracy was assessed by comparing its system response to the original nonlinear model.

Main Results:

• The proposed order-reduction method effectively linearized the nonlinear modules of the MEMS DRG mechatronics model.
• The linearized model demonstrated good agreement with the original mechatronics model in terms of system response.
• Experimental verification confirmed the validity and effectiveness of the developed linearization method.

Conclusions:

• The order-reduction method provides a viable approach to linearize nonlinear MEMS DRG models, simplifying closed-loop controller design.
• The validated linearized model enables more accurate performance analysis of MEMS DRGs.
• This research contributes to the advancement of control strategies for MEMS gyroscopes.