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Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure.
Petra Urbancova1, Jakub Chylek2, Petr Hlubina2
1Department of Physics, Faculty of Electrical Engineering and Information Technology, University of Zilina, Univerzitna 1, 01026 Zilina, Slovakia.
Sensors (Basel, Switzerland)
|December 2, 2020
Summary
We developed a new guided-mode resonance sensor using a planar waveguide structure for highly sensitive refractive index and relative humidity measurements. This hysteresis-free sensor shows great potential for various applications.
Area of Science:
- Photonics and optical sensing.
- Nanophotonics and plasmonics.
Background:
- A novel planar waveguide structure (PWS) utilizing guided-mode resonance (GMR) was designed for enhanced sensing capabilities.
- The PWS features an asymmetric three-layer structure (substrate/Au/photoresist) enabling the excitation of multiple waveguide modes.
Discussion:
- Ellipsometric characterization and optical simulations confirmed the excitation of multiple waveguide modes within the PWS.
- Theoretical analysis predicted high sensitivity to refractive index changes (up to 6600 nm/RIU) and a figure of merit (FOM) of 224 RIU-1.
Key Insights:
- The PWS demonstrated practical application in measuring relative humidity (RH) with a sensitivity of 0.141 nm/%RH and a FOM of 3.7 × 10-3 %RH-1.
- The sensor exhibits high sensitivity and is free from hysteresis, making it reliable for environmental monitoring.
Outlook:
- The GMR-based sensor's high performance suggests potential for diverse applications in chemical and biological sensing.
- Further research can explore integrating this PWS into advanced sensing platforms for real-time monitoring.
