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Updated: Nov 27, 2025

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Quantitative gas composition analysis method for a wide pressure range up to atmospheric pressure-CO2 plasma case
Ante Hecimovic1, Federico D'Isa1, Emile Carbone1
1Max-Planck-Institut für Plasmaphysik, Boltzmannstraße 2, 85748 Garching, Germany.
A new mass spectrometer sampling system accurately measures gas composition from 5 to 1000 mbar with minimal demixing. This system precisely quantifies carbon dioxide conversion in plasma torches, achieving low absolute errors.
Area of Science:
- Analytical Chemistry
- Physical Chemistry
- Plasma Science
Background:
- Accurate gas composition analysis is crucial for understanding chemical processes, especially in reactive environments like plasma torches.
- Traditional mass spectrometry sampling systems can suffer from gas demixing, leading to inaccurate concentration measurements.
- Quantifying carbon dioxide (CO2) conversion efficiency requires precise measurement of reactant and product gases.
Purpose of the Study:
- To present a novel mass spectrometer sampling system designed for accurate gas analysis over a wide pressure range.
- To demonstrate the system's capability in measuring relative concentrations of CO2, carbon monoxide (CO), oxygen (O2), and nitrogen (N2).
- To validate the system's performance through a case study of CO2 conversion in a microwave plasma torch.
Main Methods:
- Development of a custom mass spectrometer sampling system with one fixed and one variable orifice.
- Optimization and calibration of the mass spectrometer for analyzing CO2, CO, O2, and N2 mixtures.
- Implementation of a conversion determination routine to calculate relative molar flows and distinguish between CO and N2.
Main Results:
- The custom sampling system enables gas composition determination in the pressure range of 5–1000 mbar with low gas-demixing (<1.5%).
- The optimized mass spectrometer achieved an absolute error of less than 1.6% for measured CO2 conversion to CO.
- The system successfully distinguished between CO and N2, crucial for accurate CO2 conversion calculations in mixtures or with air impurities.
Conclusions:
- The developed mass spectrometer sampling system offers high accuracy and low gas-demixing for gas composition analysis across a broad pressure range.
- The system provides a reliable method for quantifying CO2 conversion in plasma processes, with demonstrated low absolute error.
- This technology is valuable for applications involving gas mixtures, air impurities, or precise monitoring of CO2 conversion.
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