Emission spectroscopy of negative hydrogen ion sources: From VUV to IR

The target parameters of negative ion sources regarding the current of extracted negative ions, the current of co-extracted electrons, the pulse duration, the duty cycle, and the availability of the system can be rather strict. Knowledge of plasma parameters such as the electron temperature and the electron density and also properties of molecules or photon fluxes can provide essential insights into the ion source physics needed for reaching the target parameters. Emission spectroscopy is a non-invasive tool enabling access to line-of-sight averaged values of plasma parameters. This paper gives an overview of the application of emission spectroscopy in the visible range, extended for long wavelengths to the near-IR and for short wavelengths to the vacuum ultraviolet (VUV)/UV range. The amount of information to be gained from measured emission spectra is directly correlated with the effort invested for calibrating the system. Examples are given, ranging from simple monitoring to the complex evaluation of molecular spectra and the determination of highly energetic photon fluxes in the VUV/UV range. Additional emphasis is laid on the population models needed for the interpretation of measured spectra.