Optical inspection path planning for large liquid crystal glass substrate detection instrument

Area of Science:

• Materials Science
• Metrology
• Optical Engineering

Background:

• Large liquid crystal glass substrates are typically supported by air flotation platforms for detection.
• Air pressure from these platforms can deform the glass substrate, compromising detection accuracy.

Purpose of the Study:

• To plan an optimal detection scanning path that minimizes glass substrate deflection variation.
• To reduce the impact of substrate deformation on the accuracy of detection instruments.

Main Methods:

• A theoretical calculation model was developed to determine deflection variation ranges for different scanning paths.
• Numerical methods were employed to solve the model and identify the optimal path.
• The proposed optimal scanning path was validated through experimental testing.

Main Results:

• The study established a method to calculate glass substrate deflection variations based on scanning paths.
• An optimal scanning path was identified that significantly minimizes deflection variation.
• Experimental results confirmed the model's accuracy and the effectiveness of the optimized path.

Conclusions:

• Optimizing the scanning path is crucial for accurate detection of large glass substrates on air flotation platforms.
• The developed theoretical model and numerical approach provide a reliable method for path planning.
• This research enhances the precision of optical inspection for large glass substrates.