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A ppm Ethanol Sensor Based on Fabry-Perot Interferometric Surface Stress Transducer at Room Temperature
Toshiaki Takahashi1,2, Yong-Joon Choi1, Kazuaki Sawada1,3
1Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan.
Sensors (Basel, Switzerland)
|December 3, 2020
Summary
This study introduces a novel microelectromechanical system (MEMS) optical interferometric sensor for highly sensitive ethanol gas detection. This breath diagnosis tool offers a less burdensome approach for disease screening.
Area of Science:
- Nanotechnology
- Chemical Sensing
- Optical Interferometry
Background:
- Exhaled breath analysis offers a non-invasive method for disease screening.
- Existing microelectromechanical system (MEMS) surface stress sensors require further sensitivity improvements for practical breath diagnosis.
