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Simulation of Human-induced Vibrations Based on the Characterized In-field Pedestrian Behavior

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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer.

Yan Li¹, Linke Song¹, Shuai Liang¹

¹School of Mechanical Electronic & Information Engineering, China University of Mining and Technology-Beijing, Beijing 100083, China.

Sensors (Basel, Switzerland)

|December 19, 2020

Summary

This summary is machine-generated.

This study develops a high-sensitivity resonant accelerometer by investigating nonlinear vibrations. Reducing beam length and increasing width/thickness minimizes unwanted vibrations, enhancing accelerometer performance and design.

Keywords:

MEMS resonant accelerometer experimental verification nonlinear vibration sample-based stochastic model uncertainty analysis

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Area of Science:

Mechanical Engineering
Micro-Electro-Mechanical Systems (MEMS)

Background:

MEMS resonant accelerometers offer high sensitivity for various applications.
Understanding and mitigating nonlinear vibrations is crucial for accurate measurements.

Purpose of the Study:

To develop a resonant accelerometer for high-sensitivity detection.
To investigate the nonlinear vibration characteristics of MEMS resonant accelerometers driven by electrostatic comb fingers.

Main Methods:

Establishing a nonlinear vibration model for the resonator with comb fingers.
Calculating nonlinear stiffness coefficients using the Galérkin principle.
Applying the multi-scale method to obtain frequency characteristics and using stochastic models for uncertainty analysis.

Main Results:

Nonlinear vibration is reduced by decreasing resonant beam length and increasing width/thickness.
Resonant beam length and thickness significantly impact vibration, while width and comb finger mass have minimal effects.
Experimental verification confirmed the analytical findings on vibration reduction.

Conclusions:

Nonlinear vibration analysis using uncertainty methods is effective for resonant accelerometers.
Design parameters like resonant beam dimensions are critical for optimizing accelerometer performance.
This research provides valuable insights for practical resonant accelerometer design.