Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

Area of Science:

• Mechanical Engineering
• Micro-Electro-Mechanical Systems (MEMS)

Background:

• MEMS resonant accelerometers offer high sensitivity for various applications.
• Understanding and mitigating nonlinear vibrations is crucial for accurate measurements.

Purpose of the Study:

• To develop a resonant accelerometer for high-sensitivity detection.
• To investigate the nonlinear vibration characteristics of MEMS resonant accelerometers driven by electrostatic comb fingers.

Main Methods:

• Establishing a nonlinear vibration model for the resonator with comb fingers.
• Calculating nonlinear stiffness coefficients using the Galérkin principle.
• Applying the multi-scale method to obtain frequency characteristics and using stochastic models for uncertainty analysis.

Main Results:

• Nonlinear vibration is reduced by decreasing resonant beam length and increasing width/thickness.
• Resonant beam length and thickness significantly impact vibration, while width and comb finger mass have minimal effects.
• Experimental verification confirmed the analytical findings on vibration reduction.

Conclusions:

• Nonlinear vibration analysis using uncertainty methods is effective for resonant accelerometers.
• Design parameters like resonant beam dimensions are critical for optimizing accelerometer performance.
• This research provides valuable insights for practical resonant accelerometer design.