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Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing.

Adrian Zakrzewski1, Piotr Jurewicz1, Michał Ćwikła1

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Imaging scatterometry limitations at small angles are overcome by reconstructing reflection distributions using multiple measurements and extrapolation. This method enhances the analysis of materials used in laser processing.

Keywords:
BRDF reconstructionimaging scatterometryreflection distribution

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Area of Science:

  • Optical Engineering
  • Materials Science

Background:

  • Imaging scatterometry measures reflection distribution via bidirectional reflectance distribution function (BRDF).
  • Existing methods are limited by useless results at small illumination angles.

Purpose of the Study:

  • To develop an approach for reconstructing reflection distribution by overcoming imaging scatterometry's limitations.
  • To enhance the analysis of materials used in laser material processing.

Main Methods:

  • A novel algorithm combines measurements at various illumination angles with extrapolation.
  • Validation performed using bidirectional transmittance distribution function (BTDF) measurements.
  • Bidirectional reflectance distribution function (BRDF) measurements conducted on common laser material processing substrates and coatings.

Main Results:

  • Successfully reconstructed reflection distributions for various materials.
  • Determined total reflection intensity by characterizing materials with reconstructed distributions.
  • Validated the reconstruction approach using BTDF measurements.

Conclusions:

  • The proposed method effectively reconstructs reflection distributions, overcoming limitations of traditional imaging scatterometry.
  • This technique provides a more comprehensive understanding of material reflection properties.
  • Applicable to materials commonly used in laser material processing.